Model ESA Dry Vacuum Pumps For H2 Rich Applications

HIGH HYDROGEN PUMPING SPEED

The ESA25-D and the larger ESA70W-D, ESA80W-D, ESA100W-D and ESA200W are particularly outmatching in applications with a high content of light process gases because of their extremely good pumping speed for H2, He, etc.

The ESA25-D has been developed from the successful A25S. With its unique design, the pump has been the market leader for application with high content of H2 in the process gas.

Customer Benefits:

  • Best performance in H2 based processes
  • Dual voltage motor – cost savings in stock inventory
  • Very robust
  • Compact size – easy integration in process tools

Technical Characteristics:

  • Multi-stage Roots pump
  • 3-lobe Roots pump design preventing back streaming of light gases like H2
  • ESA70W-D and larger are packaged with a lobe style booster pump
  • Pressure shock resistant

Technical Data

Model   ESA25-D ESA70W-D ESA-80W-D ESA100W-D ESA200W
Pumping speed (N2) [m3/h] 150 (50 Hz)
180 (60 Hz)
420 (50 Hz)
504 (60 Hz)
504 600 1,200
  [l/min] 2,500 (50 Hz)
3,000 (60 Hz)
7,000 (50 Hz)
8,400 (60 Hz)
8,400 10,000 20,000
Ultimate pressure (50/60 Hz) [mbar] 2.0 x 10E-2 2.7 x 10E-3 /
1.3 x 10E-3
1.3 x 10E-3 1.3 x 10E-3 5.3 x 10E-3
  [Pa] 2.0 0.27 / 0.13 0.13 0.13 0,53
Cooling water [l/min] 3.5 - 8 3.5 - 8 3.5 - 8 3.5 - 8 3.5 - 8
Nitrogen consumption [slm] 11 - 13 14 - 16 14 - 16 14 - 16 11 - 13
clean applications [slm] 2.1 2.1 2.1 2.1 2.1
Voltages ranges [V] 200-220 and 380-420, 3-phase 200-220 and 380-420, 3-phase 200-220 and 380-420, 3-phase 200-220 and 380-420, 3-phase 200 - 220, 3-ph
380 - 440, 3-ph
Motor power, installed [kW] 3.7 5.9 7.4 7.4 3.2 (50 Hz)
3.4 (60 Hz)
Power at ultimate pressure [kW] 2.6 3.6 4.2 4.2  
Weight, approx. [kg] 240 380 400 400 420
Sizes (LxWxH) [mm] 1074x394x520 985x400x770 985x400x800 985x400x840 970x400x907
Inlet flange size DN 50 KF 50 KF 50 KF 50 KF 100 ISO-K
Outlet flange size DN 40 KF 40 KF 40 KF 40 KF 40 KF
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