Model ESR Dry Vacuum Pumps

ROOTS TYPE PUMPS FOR CLEAN AND MEDIUM DUTY APPLICATIONS

The ESR Series (Energy Saving Roots) are multi-stage dry vacuum pumps engineered for application from clean to medium duty processes such as Load Lock, SEM, PVD, Ashing, Sputtering and Etch. The ESR Series covers a wide pumping speed range from 120 to 3,000 m3/h and is distinguished by low ultimate pressure.

The larger models ESR80WN, ESR200WN, ESR300WN and ESR500WN are combinations of main pump with an additional booster pump on top. Both pumps are Roots pumps.

The pump is constructed of NiResist, a homogeneous steel alloy with high Ni-content known for its superior corrosion resistance.

Customer Benefits:

  • Low Cost of Ownership [power, N2, water, footprint, volume, weight]
  • Variable pumping speed to match application requirements
  • State-of-the-art control and monitoring devices
  • Idle mode can be employed for increased utility savings

Technical Characteristics:

  • Multistage lobe design engineered for application in clean and medium harsh processes as Load Lock, SEM, PVD, Ashing, Ion Implantation and Etch
  • Adjustable pumping speed by RPM variation
  • High pump operating temperature preventing condensation and clogging
  • High performance brushless DC motors
  • Low noise and low vibration
  • Thoroughly corrosion resistant material

Technical Data

Model   ESR20N ESR30N ESR80WN ESR100WN ESR200WN ESR300WN ESR500WN
Pumping speed (N2) [m3/h] 120 180 510 600 1,200 1,800 2,760
  [l/min] 2,000 3,000 8,500 10,000 20,000 30,000 46,000
Ultimate pressure [mbar] 2x10E-2 6.7x10E-3 2x10E-3 2x10E-3 1.3x10E-3 2x10E-3 2x10E-3
  [Pa] 2 0.67 0.2 0.2 0.13 0.2 0.2
Cooling water [l/min] 2 - 8 2 - 8 2 - 8 2 - 8 2 - 8 3.5 - 8 3.5 - 8
Nitrogen [slm] 11 - 13 11 - 13 11 - 13 11 - 13 11 - 13 11 - 13 11 - 13
Clean applications [slm] 0 2 2 2 2 2 2
Voltages ranges [V] 200 - 220 / 380 - 440, 3-ph, 50/60 Hz 200 - 220 / 380 - 440, 3-ph, 50/60 Hz 200 - 220 / 380 - 440, 3-ph, 50/60 Hz 200 - 220 / 380 - 440, 3-ph, 50/60 Hz 200 - 220 / 380 - 440, 3-ph, 50/60 Hz 200 - 220 / 380 - 440, 3-ph, 50/60 Hz 200 - 220 / 380 - 440, 3-ph, 50/60 Hz
Maximum power [kW] 2.2 3.5 5.2 4.5 5.6 7.5 7.9
Power at ultimate pressure [kW] 0.7 1.7 1.0 1.0 1.1 2.9 3.1
Weight, approx. [kg] 105 190 200 200 250 390 500
Sizes (LxWxH) [mm] 695x280x370 760x400x488 720x380x705 704x380x705 825x460x880 975x460x880  
Inlet flange size DN 40 KF 50 KF 50 KF 50 KF 100 ISO-K 100 ISO-K 160 ISO-K
Outlet flange size DN 40 KF 40 KF 40 KF 40 KF 40 KF 40 KF 40 KF
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