BURNER WASHERS

HIGHLY EFFICIENT AND UNIVERSAL

EBARA's Burner Washers of the G series (principle: Gas Decomposition by Combustion) are high efficient universal abatement systems for abatement of the waste gases in the semiconductor, photovoltaic and thin films manufacturing. They are designed for the abatement of CVD, etch and cleaning gases.

Global environmental regulations concerning PFC gases are becoming more and more stringent. The EBARA burner-washers are unique abatement systems equipped with a patented "Rolling Burner" that guarantees reliable PFC abatement to an unprecedented low level.

The thermal decomposition in the flame is followed by a wet scrubbing of the burned products in a highly efficient multi-stage water scrubber to retain the remaining particles and adsorb the water soluble gases. The system is equipped with a large water tank for efficient absorption of large quantities of water soluble gases and solid burn products.

Customer Benefits:

  • Low Cost of Ownership through low utility consumption and long maintenance intervals
  • Highest safety standards to eliminate any risk for operators and environment
  • No risks of corrosion - all pipes are protected with corrosion resistant material
  • No chemicals necessary
  • Automatic scraper for mechanical cleaning of reactor and burner prevent blockages. Allows cleaning without opening the system and reduce preventive maintenance
  • Simplified maintenance access from front side only

Technical Data

Model   G5 G6 G6-E G6-PV
Max. flow rate of inlet waste gas [slm] 350 1,200 400 1,200
No. of inlet ports   1 - 4 1 - 4 1 - 4 1 - 4
Fuel type   city gas, propane city gas, propane city gas, propane city gas, propane
Fuel consumption [slm] 13 - 25 25 - 50 15-17 25 - 50
Max. oxygen consumption [slm] 58 98 30 98
Nitrogen flow rate [slm] 100 20 - 200 100 20 - 200
Max. nitrogen consumption [slm] 25 200 25 200
Max. water consumption [l/min] 5 - 10 17 - 50 17 - 35 17 - 50
Voltage / Phase / Frequency   208 V, 3-ph, 50 Hz 400 V, 3-ph, 50 Hz 400 V, 3-ph, 50 Hz 400 V, 3-ph, 50 Hz
Average power consumption [kWh/h] 1.1 3.5 1.1 3.5
System size (LxWxH) [mm]        
Weight, approx. [kg] 550 1,600 550 1,600
Application areas   SEMI, FPD, PV SEMI EPI / EUV PV
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