ECO TECHNOLOGIES

EBARA - TECHNOLOGY LEADER FOR ENVIRONMENTAL PROTECTION

EBARA as a group is committed to play a key role in the most serious challenges of our environment: lack of energy, lack of water and global warming. EBARA Precision Machinery provides components with special design characteristics to meet essential requirements for environmental protection in high-technology industries such as Semiconductor, Flat Panel, Photovoltaic and LED. The special design characteristics target low consumption of materials, fuel, electrical energy and water. EBARA is committed to meet future environmental demands by sustainably working towards leading edge ECO technologies (ECO = derived from ECOlogical).

Since the release of the latest power-saving EV-S series of dry vacuum pumps in 2008 EBARA has been promoting to its customers the replacement of pumps to maximize power-saving effects. EBARA offers this option to 300mm fabs,  200mm or even smaller wafer processing fabs.

Statistical data show that in a semiconductor fab production equipment accounts for 40 to 60 % of the total power consumption.  Dry vacuum pumps used in vacuum processes (e.g. film deposition and etching systems) account for 12 to 13 % of the total power consumption in the fab.

EBARA offers the replacement of existing dry vacuum pumps with the new models that provide excellent utility-saving capabilities. Through demonstration tests EBARA has learned that with the new models the dry pumps power consumption  can be reduced from 12 to 13 % down to  only approximately 5 % of total fab power consumption. EBARA focuses on providing best scenarios for customers to receive maximum Return on Investment.

In addition to the power savings of the pumps, power consumption can be further reduced by a combination of operation stoppage and speed reduction (intermittent operation) at times when operation is not required by the process condition.

Today a large volume of global warming gas (PFCs) and other harmful gases is used in Semiconductor, liquid crystal display manufacturing, LED, PV and other processes. A lot of effort is made to reduce global warming gas emissions in such processes from manufacturers worldwide. The demand for gas abatement technology has therefore increased.
With this trend since around 1997 (when the Kyoto Protocol was adopted) EBARA has released various gas abatement products to help and support reducing global warming gas emissions. Our products include combustion gas abatement systems for PFC and fluoride waste gases.

EBARA recently answered the request for NF3 abatement with the newly developed G6-PV.

EBARA's combustion gas abatement systems, G5, G6-E and G6-PV, ensure high efficiency in abatement performance with the swirling flame effect in the special burner developed by EBARA. It also takes energy saving into consideration by optimizing the consumption of utilities, such as fuel, oxygen, etc.

The system achieves further energy saving with an automatic control function capable of optimizing the utility flow rates according to the operating condition of process tools. EBARA abatement systems can communicate with the tool. For example the system can change the utility flow rates for each of following conditions: processing (e.g. film deposition), chamber cleaning or tool idling.

In terms of the greenhouse effect (CO2 equivalent) power consumption and fuel use by EBARA's combustion gas abatement systems are lower than those of electrical heating type (heater type) systems manufactured by other companies.

Compared to other processes CMP uses more process consumables in general. Among the CMP consumables slurry is a major portion of overall CMP consumables and also an essential one as the CMP being polishing technology.
Slurry requires waste treatment in general therefore use of slurry can be an environmental burden. EBARA's improvements in slurry dispense technology and process parameter optimization enables significant slurry usage reduction (1/3!) while achieving the same removal rate.