Model EMT Turbomolecular Pumps

EBARA's Magnetic Levitated Turbo Pumps

The EMT Series Turbomolecular Pumps are 5-axis magnetically levitated vacuum pumps that are completely hydrocarbon free. These pumps are suitable for varied applications from the harshest semiconductor application as well as ultra-high vacuum and ultra-low vibration applications.

Beside the Standard Version, the EMT Series offers five major types of turbomolecular pumps - temperature-controlled, corrosion resistant, ultra low vibration, radiation resistant, and ultra high vacuum.

The EMT Series turbomolecular pumps features a wide pressure range with maximum back pressure up to 3 Torr.

The temperature controlled model turbomolecular pumps reduce the rate condensation of the byproduct and process effluent build up commonly found inside a turbomolecular pump. The patented thermal insulation structure with integrated temperature management system is the most energy efficient temperature controlled turbomolecular pump on the market today.

The Ultra high vacuum model turbomolecular pumps efficiently evacuate the lightest gases from high vacuum down to the ultra high vacuum region by reducing the materials' out gassing and improving the efficiency of hydrogen compression. The Ultra high vacuum model turbomolecular pump can achieve 10-10 mbar (10-8 Pa) with a short bake-out period.

The Ultra Low Vibration model turbomolecular pumps meets today's cutting edge challenges in EUV lithography, Micro-machining (MEMS), CD line width measurement, SEM/TEM Electron Microscopy, XPS and Nano-technology analytical tools. The Ultra low vibration model turbomolecular pumps produce less than 1nm vibration amplitude.

Technical Characteristics:

  • Full magnetic bearing
  • Installation in any orientation
  • High throughput
  • Compact size
  • Rotational speed control
  • Vibration free
  • Air or water cooled
  • Safety Standards CE, UL, SEMI, NRTL

Technical Data

Model   EMT390M EMT420M EMT900M EMT1300M EMT2400M EMT2200MK EMT3300MK EMT4200MK
Max. pumping speed (N2) [l/s] 340 400 900 1,300 2,400 2,200 3,300 4,200
Max. pumping speed (H2) [l/s] 290 300 1,050 1,200 1,100 1,800 2,700 2,800
Max. compression ratio (N2)   1 x 10E8 1 x 10E8 1 x 10E8 1 x 10E8 1 x 10E8 2 x 10E8 1 x 10E8 2 x 10E8
Max. compression ratio (H2)   4.5 x 10E3 4.5 x 10E3 1.5 x 10E4 1.5 x 10E4 1.4 x 10E3 3 x 10E3 3 x 10E3 2 x 10E3
Ultimate pressure [mbar] <1 x 10E-8 <1 x 10E-8 <1 x 10E-8 <1 x 10E-8 <1 x 10E-8 <1 x 10E-8 <1 x 10E-8 <1 x 10E-8
  [Pa] <1 x 10E-6 <1 x 10E-6 <1 x 10E-6 <1 x 10E-6 <1 x 10E-6 <1 x 10E-6 <1 x 10E-6 <1 x 10E-6
Max. outlet pressure [mbar] 4 4 5 5 2 2.2 1.7 2.2
Inlet flange size DN 100 ISO-F
100 CF
160 ISO-F
160 CF
160 ISO-F
160 CF
200 ISO-F
200 CF
250 ISO-F 250 ISO-F 320 ISO-F 320 ISO-F
Outlet flange size DN 25 KF 25 KF 40 KF 40 KF 40 KF 40 KF 40 KF 40 KF
Vibration level (0 to peak) [μm] ≤0.01 ≤0.01 ≤0.01 ≤0.01 ≤0.01 ≤0.01 ≤0.01 ≤0.01
Weight w. ISO-F flange, approx. [kg] 14 14 34 34 45 62 69 75
Turbo controller   ETC011M ETC011M ETC011M ETC011M ETC021M on-board on-board on-board
Voltages range [V] 200 - 240, 1-ph, 50/60 Hz 200 - 240, 1-ph, 50/60 Hz 200 - 240, 1-ph, 50/60 Hz 200 - 240, 1-ph, 50/60 Hz 200 - 240, 1-ph, 50/60 Hz 200 - 240, 1-ph, 50/60 Hz 200 - 240, 1-ph, 50/60 Hz 200 - 240, 1-ph, 50/60 Hz
Options   Corrosive resistant type
Air or water cooled
Temperature Management System
Corrosive resistant type
Air or water cooled
Temperature Management System
Corrosive resistant type
Air or water cooled
Temperature Management System
Corrosive resistant type
Air or water cooled
Temperature Management System
Corrosive resistant type
Air or water cooled
Temperature Management System
Corrosive resistant type
Temperature Management System
Corrosive resistant type
Temperature Management System
Corrosive resistant type
Temperature Management System
Options   Ultra low vibration Ultra low vibration Ultra low vibration Ultra low vibration        
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