EBARA frequently has available re-manufactured dry vacuum pumps and turbomolecular pumps as well as used wafer processing systems on sale at attractive conditions. Please check the list and contact us for a quotation.
Equipment is offered subject to prior sale. Items will be quoted based upon specific configuration, terms and configuration required. Please contact info@ebara-pm.eu.
| Ref. | Pump Model | Pumping Speed |
Voltage | Status | Quantity Available |
| 102 | A07V Multi-stage Roots pump | 42 m3/h | 208 V | refurbished | 3 |
| 104 | A10S Multi-stage Roots pump | 60 m3/h | 400 V | refurbished | 2 |
| 108 | A30W Multi-stage Roots pump with integrated booster pump | 180 m3/h | 208 V | refurbished | 3 |
| 113 | AA10 Multi-stage Roots pump | 78 m3/h | 208 V | refurbished | 2 |
| 114 | AA30H Multi-stage Roots pump | 180 m3/h | 208 V | refurbished | 1 |
| 115 | AA100WN Multi-stage Roots pump with integrated booster pump | 600 m3/h | 208 V | refurbished | 2 |
| 116 | AA100W Multi-stage Roots pump with integrated booster pump | 600 m3/h | 400 V | new* | 2 |
| 117 | AAS10N Multi-stage screw pump | 60 m3/h | 400 V | new* | 1 |
| All pumps are CE marked. Pumps are partly w/o housing. Subject to prior sale. * from excess stock. |
All pumps are CE marked. Pumps are partly w/o housing. Subject to prior sale. * from excess stock. |
All pumps are CE marked. Pumps are partly w/o housing. Subject to prior sale. * from excess stock. |
All pumps are CE marked. Pumps are partly w/o housing. Subject to prior sale. * from excess stock. |
All pumps are CE marked. Pumps are partly w/o housing. Subject to prior sale. * from excess stock. |
All pumps are CE marked. Pumps are partly w/o housing. Subject to prior sale. * from excess stock. |
| Ref. | Tool Type | Application | Quantity Available |
| 203 | FREX 200 CMP System | ILD | 1 |
| 204 | FREX 200 CMP System | Tungsten | 1 |
| 205 | FREX 300 CMP System | Copper | 1 |
