Turbo Pumps

Model EMT

The EMT Series Turbomolecular Pumps are 5-axis magnetically levitated vacuum pumps that are completely hydrocarbon free. These pumps are suitable for varied applications from the harshest semiconductor application as well as ultra-high vacuum and ultra-low vibration applications.

Model EBT

The EBT Series of Turbomolecular Pumps is a full line of ceramic bearing pumps suitable for Analytical and R&D vacuum needs. The EBT Ceramic Bearing system is extremely rugged making it ideal for mobile applications. The EBT70 and EBT240 pumps are available with integrated controller.