• Systems

One Step Ahead

Ready to face the challenges of semiconductor miniaturization, 3D modelling and cost-cutting. In January 2022, EBARA has delivered 3,000 cumulative CMP systems.

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R&D

We invest heavily in Europe to expand our leading-edge technologies such as 3-D modelling. We are prepared for the future.

Disruptive

We engage in technologies such as IoT, Car, A/R, clouds, 5G and in innovative materials such as GaN, SIC and Saphire.

Enhancing

We constantly work on new technologies for CMP tools such as polishing and plating on 6‘‘ to 12‘‘ wafers.

Systems

EBARA is a world market leader in CMP, bevel polishing and plating systems. Customers value the quality, stability and low cost of ownership. We offer specialized machining equipment that requires machining precision at the micrometer (um) and nanometer (nm) levels.

CMP systems and tools, semiconductors, chip manufacturing

CMP Tools

Our CMP tools stand for high flexibility and productivity for 150 mm, 200 mm and 300 mm wafers. We are proud of our steadily growing installed base of best-in-class performance.

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Substrate Plating

The Ultra Fine Plating series is for all thorough mask plating processes including redistribution and bumping in the wafer level packaging processes.

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Wafer Bevel Polishing

Our tools not only remove damages and clean surfaces but also reshape the bevel to a specific profile using a mechanical slurry-free process.

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Efficiency

Challenge in miniaturization

EBARA’s CMP systems enable 300-millimeter semiconductor
wafers to be miniaturized and made ultra-smooth, down
to the 10- to 20-nanometer level.

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Experience

EBARA offers 4 platen platforms for CMP Systems since 2003

High flexibility and keeping the advance end point over the years by following the Moore law, EBARA stands for best solutions.

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Best in-class

wafer chip manufacturing Halbleiterindustrie CMP

Applications

Find all applications covered by CMP.

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Ying Yang Kundenzufriedenheit; Ausgewogenheit

Service

From remote support to field service assignments.

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Process

Accelerate product and process development.

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Are you looking for a CMP solution?

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