EBARA - Innovation, Reliability, Sustainability
Global Innovators - Local Providers
Dry Vacuum Pumps
Forward-Looking Pump Solutions
for Clean Vacuum Applications.
Gas Abatement Systems
Point-of-use Treatment Systems -
highly productive for most processes
in the Semiconductor
and Photovoltaic Industry.
Wafer Processing Tools
Innovative Processing Technologies
for the Semiconductor Industry.
Vacuum Bake Cleaner
Cleaning Equipment for
GaN and AlN Coated Parts