EBARA - Innovation, Reliability, Sustainability

Global Innovators - Local Providers

Read More

Dry Vacuum Pumps

Forward-Looking Pump Solutions
for Clean Vacuum Applications.

Read More

Gas Abatement Systems

Point-of-use Treatment Systems -
highly productive for most processes
in the Semiconductor
and Photovoltaic Industry.

Read More

Wafer Processing Tools

Innovative Processing Technologies
for the Semiconductor Industry.

Read More

Vacuum Bake Cleaner

Cleaning Equipment for
GaN and AlN Coated Parts

Read More

ICPT2017

EBARA Corporation and EBARA Precision Machinery Europe will be part of the ICPT 2017 - International Conference on Planarization / CMP Technology.

New Model EV-A

EBARA's Model EV-A - a new generation of air-cooled dry vacuum pumps for general vacuum applications.
 

New Turbo Pumps

EBARA offers new families of compound turbomolecular pumps with mechanical bearing and with magnetically levitated rotors.
 

Exhibitions & Events

A regular dialogue with our customers and partners is very important to us improving continuosly our products and services! We invite you meeting us at the following Events.