• About EBARA

Since 1912

Leading-edge technology from Japan.

Technology. Passion.
Support the Globe.

EBARA is a worldwide leading global manufacturer of vacuum and semiconductor systems used in the production of wafers, liquid crystals, solar cells and other products requiring advanced technology. EBARA has the second largest global market share for CMP systems. With a development department in Fujisawa and manufacturing in Kumamoto, EBARA can rapidly respond to customers’ needs and achieve mass production. EBARA Corporation was founded in November 1912 and is headquartered in Tokyo, Japan.

19,600+

Employees Worldwide

~ 4,7

Billion EUR Revenue

96

Group Companies Worldwide

EBARA Company Movie

Watch the EBARA CORPORATION Movie

EBARA Worldwide Brand Movie

Watch the EBARA CORPORATION Brand Movie

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Since 1912 EBARA is dedicated to drive the future of vacuum and semiconductor systems.

About us
Founder of Ebara; history

„When you work with passion and dedication anything is possible.“

Issey Hatakeyama, Founder of EBARA
Read about our history
Brand statement EBARA

Challenge and Creativity

The driving force

Our brand statement reflects our entrepreneurial spirit, which is never satisfied with the status quo. Ahead stands for our leadership – always one step ahead of the competition. Beyond expresses our promise to exceed expectations of our stakeholders. That is our motivation day-by-day.

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EBARA Automatic Assembly Factory

Please note: When you click “play” on a Youtube video, your cookies data will be transmitted to another country, in this case to Google, which is based in the US. The US has been deemed by the European Court of Justice as a country with an insufficient level of data protection according to EU standards (the EU-US Privacy Shield has been declared invalid). In particular, there is a risk that your data will be processed by US authorities, for control and for monitoring purposes, possibly also without any legal remedy.

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EBARA is dedicated to sustainability and environmental protection to support our globe.

About us

We Support Our Globe.

Corporate Social Responsibility

The EBARA Group is also committed to social contribution activities with the focus being on technical and educational assistance in business fields related to water, air and the environment.

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Japan roots environment protection support our globe

Corporate Social Responsibility

CSR Reports

High added value

Supporting society with passion, dedication and pride.

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Code of Conduct

Taking responsibility

Maintaining a high standard of ethics and pride around the globe.

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Member of United Nations Global compact, globe, support

UN Global Compact

Creative leadership

Aligning business activities and strategies with ten principles.

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To CSR

Would you like to learn more about EBARA Corporate?

EBARA Corporate

About EBARA Precision Machinery Europe

About EPME

Precision in Europe

Dry vacuum pumps, gas abatement systems and CMP systems.

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Partners

Strong together

With our distributors and partners we are present in eight countries.

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Events

Meet us

We are looking forward talking to you here.

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Do you want to join our company?

Careers

Tradition meets innovation.

EBARA can look back on a company history rich in tradition. The roots lie in Japan. To this day, EBARA is characterized by top Japanese technology. EBARA’s research and development team is constantly driving innovations forward.

1912



EBARA founded by Issey Hatakeyama

1915

Production of record-breaking large-size pumps for Tokyo City with a diameter of 1,140 mm

1920

Registration of EBARA Corporation

1921

First centrifugal blower by EBARA

1924

First axial-flow pump in Japan

1925 – 1931

Production of pumps in Japan for city water, first centrifugal chiller in Japan, first rapid filter for city waterworks in Japan

1955

Standardization and mass production of small-size pumps

1961

First mechanical stoker type incinerator

1965

Established Fujisawa Plant. In 2008 over 15 million standard pumps were produced here

1975

First oversea production plant in Brazil

1985

Entry in the business for semiconductor industry

1986

First dry vacuum pump

1990

First plating system

1992

First CMP system

1998 – 2019

Continuous evolution of gas abatement systems
(GDC => GDC-S => G5 => G6 => TND)

2004

First bevel polishing system

2005 – 2019

Continuous evolution of vacuum pumps (EV-PA) and CMP systems (F-Rex200M2 & F-REX300X)

2019

More than 190,000 sold dry vacuum pumps

2022

EBARA has delivered 3,000 cumulative CMP systems

We support our planet.

To CSR