Industries
EPME offers the best-in-class solutions for industries with the highest requirements. Focus on your core business – we will take care of the processes for vacuum, gas abatement and CMP.
Industries and Applications
EBARA products support various applications in different industries.
Semiconductors
- Ashing
- Atomic Layer Deposition (ALD)
- Chemical Vapor Deposition (CVD)
- Diffusion
- Epitaxy
- Etch Processes
- Ion Implant
- Lithography-Metrology
- Load Lock Vacuum
- Micro Machining (MEMS)
- Physical Vapor Deposition (PVD)
- Rapid Thermal Processing (RTP)
- Residual Gas Analysis
- Silicium Technology
- Sputtering
- Surface Analysis
General Vacuum
- Coating
- Flat Panel Display (FDP)
- Industry
- Leak Detection Systems
- Machine Tooling
- Magnetic Media
- Medical Engineering
- Vacuum Drying
Analytical Instruments
- Analytical Tools
- Electric Gravometrics
- Mass Spectrometres
- Microsopy
- Osmometrics
- XPS
R & D
- Biotechnology
- Elementary Particle Physics
- Nanotechnology
- Nuclear Fusion
- Particle Accelerator
- Plasma Research
Photovoltaic
- Atomic Layer Deposition (ALD)
LED
- LED Manufacturing
Chemical Industry
- Fluoroproducts
- Industrial Chemical Productions
- Oxidation of Pyrophoric Gases
- Special Chemistry
