Optimize your processes.
Customer Support Systems
The helpline to find solutions
Our Service Team cares for all our tool platforms and options. If you have no on-site service, contact our team about technical requests and needs.
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Field Service Systems
At your side by request
Our CMP Systems experts for 200 mm & 300 mm, robotics, software, mechanics and endpoint, provide you with on-site support. All services are documented in a service report for follow-up actions.
Contact FormRepair Service
Our service team in the refurbishment centre takes care of OEM items, repairs and refurbishes mechanical assemblies and electrical components.
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Repair Service for
- G3/GX Head Cylinder Assy Refurbishment
- G2/G3/GX Head Rebuilts
- Top Ring Shaft Refurbishment
- Mity Controllers
- Endpoint System Parts Repair
- Robots and Robots Controllers
- Scodip CLC
- Top Ring & Dresser Spindle Assy Refurbishment
- Turn Table Motors
- Controllers and Motors by Yaskawa & Mitsubishi
Refurbishment
All tools are refurbished to a high quality following standard OEM procedures. We offer tool upgrades to meet your specifications. All set-up tests are done in a cleanroom at our service centre.
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Spare Parts
Our warehouse stocks the original EBARA spare parts. The components are available within 24 hours. Spare parts from other manufacturers are available on request.
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