EV-X

The sustainable one

More efficient vacuum pump with smaller footprint

Description

The EV-X series is perfect for medium to harsh applications with low ultimate pressure. The various technologies enable a wide range of applications. We receive a foot print reduction up to 38% to other vacuum pumps in the market. All pumps in this series have optimized pump temperature profiles. An optimized rotor design enables higher gas flow pumping.


Core Benefits

Over 30% Foot print reduction

Long maintenance cycles

Wide range of applications

Low power consumption

Optimized pump temperature profile

Higher gas flow pumping

Product Information

Application Range

light harsh

Pumping speed

3.000 – 30.000 l/min

Models

EV-X30N

EV-X100

EV-X200

EV-X300

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Applications for EV-X

  • Physical Vapor Deposition (PVD)
  • Ashing
  • Sputtering
  • Ion Implant
  • Etching
  • SEM
  • PE CVD
  • HDP CVD

The Energy Saving and Wide Application Model: The EV-X Series Dry Vacuum Pump


The EV-X dry vacuum pump, an innovative product by EBARA contributes to sustainability and energy savings. Through this description, we aim to focus solely on the standout features of the EV-X series, part of the dry vacuum pump portfolio, that delineate it as the best fit for medium to harsh applications, promising low vibrations and noise levels without a hefty price tag.

A Model of Small Foot Printing: Tailored for a Wide Range of Applications

The EV-X dry vacuum pump stands out in the world of dry vacuum pumps with its small foot print that adjusts perfectly to medium to harsh applications. Engineered with a keen eye for adapting to various industrial needs, its variable pumping speeds allow it to be molded for a wide range of applications. Be it a stringent requirement or a moderate one, the EV-X doesn’t just fit in; it excels, proving itself to be a versatile companion in different operation setups.

Dive Deeper: The Energy Saving Advantage

One of the salient features of the EV-X series is its capacity to save energie up to a level of 38% energy saving in comparison to other vacuum pumps in this product range. The small foot print combined with the energy saving reduction speak for the EV-X series.

Quiet Yet Powerful: Experience Low Noise and Vibration Levels

In a league of its own, the ESR dry vacuum pump promises a user experience characterized by low noise levels, ensuring a quieter operational environment. The significantly reduced vibrations not only contribute to a noise-free environment but also stand testimony to the stable and smooth operation of the pump, promising a hassle-free experience that meets the high standards set by EBARA.

A Showcase of Simple Structure and Space Saving

The EV-X dry vacuum pump has an optimized design on control functions for space saving. All models are covered with a standardized control panel. that ensures a lower cost of ownership, giving you a product that is as economic as it is efficient.

Why EV-X: A Recapitulation

As we wrap up our focus on the EV-X dry vacuum pump, it becomes evident that it is not just a vacuum pump, but a companion for sustainability and energy saving, bringing with it the trust and reliability that defines EBARA. With its wide range of applications, it offers an adaptable solution by various technologies e.g., individual PCW-control and side-cover/heating jacket options.

The higher gas flow tolerance enable the various applications and flexibility. Small foot print, energy saving, simple structure, space-saving and the wide application coverage makes the EV-X series the one and only solution for industrial needs.

Success Story

Smart, clean and green.

The chemical industry profits from our integrated solution for the disposal of fluorine-containing gases through highly efficient and reliable gas abatement systems and vacuum pumps.

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Best reliability in class. Best return on investment in class. 100% Peace of Mind